{"_buckets": {"deposit": "a17dd998-dc40-4aef-b4a3-6d6bf2abdb1e"}, "_deposit": {"created_by": 14, "id": "823", "owners": [14], "pid": {"revision_id": 0, "type": "depid", "value": "823"}, "status": "published"}, "_oai": {"id": "oai:ous.repo.nii.ac.jp:00000823", "sets": ["322"]}, "author_link": [], "item_1_biblio_info_14": {"attribute_name": "書誌情報", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "1989-03-20", "bibliographicIssueDateType": "Issued"}, "bibliographicPageEnd": "148", "bibliographicPageStart": "137", "bibliographicVolumeNumber": "24", "bibliographic_titles": [{"bibliographic_title": "岡山理科大学紀要. A, 自然科学", "bibliographic_titleLang": "ja"}, {"bibliographic_title": "Bulletin of Okayama University of Science. A, Natural Sciences", "bibliographic_titleLang": "en"}]}]}, "item_1_creator_6": {"attribute_name": "著者名", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "栗田, 満史", "creatorNameLang": "ja"}, {"creatorName": "クリタ, ミツフミ", "creatorNameLang": "ja-Kana"}, {"creatorName": "Kurita, Mitsufumi", "creatorNameLang": "en"}]}, {"creatorNames": [{"creatorName": "竹中, 進", "creatorNameLang": "ja"}, {"creatorName": "タケナカ, ススム", "creatorNameLang": "ja-Kana"}, {"creatorName": "Takenaka, Susumu", "creatorNameLang": "en"}]}, {"creatorNames": [{"creatorName": "中川, 紀美雄", "creatorNameLang": "ja"}, {"creatorName": "ナカガワ, キミオ", "creatorNameLang": "ja-Kana"}, {"creatorName": "Nakagawa, Kimio", "creatorNameLang": "en"}]}, {"creatorNames": [{"creatorName": "赤尾, 文雄", "creatorNameLang": "ja"}, {"creatorName": "アカオ, フミオ", "creatorNameLang": "ja-Kana"}, {"creatorName": "Akao, Fumio", "creatorNameLang": "en"}]}]}, "item_1_description_1": {"attribute_name": "ページ属性", "attribute_value_mlt": [{"subitem_description": "P(論文)", "subitem_description_type": "Other"}]}, "item_1_description_12": {"attribute_name": "抄録(英)", "attribute_value_mlt": [{"subitem_description": "We have optically characterized a-SiC : H films prepared by plasma-CVD techniques under various deposition conditions. Infrared spectra were measured at room temperature, from which the banded H content (C_H) could be deduced. The optical band gap (E_o) and the slop of Urbach tail (E_e) by means of photoacoustic spectroscopy (PAS) at room temperature were obtained. The correlation between E_e and C_H was discussed from these data. As the result, we have found that the increase of the amount of H_2 gas affects the Urbach tail and serves the suppression of the disorder in the lattice.", "subitem_description_language": "en", "subitem_description_type": "Other"}]}, "item_1_source_id_13": {"attribute_name": "雑誌書誌ID", "attribute_value_mlt": [{"subitem_source_identifier": "AN00033244", "subitem_source_identifier_type": "NCID"}]}, "item_1_text_10": {"attribute_name": "著者所属(英)", "attribute_value_mlt": [{"subitem_text_language": "en", "subitem_text_value": "Graduate School of Science, Okayama University of Science"}, {"subitem_text_language": "en", "subitem_text_value": "Graduate School of Science, Okayama University of Science"}, {"subitem_text_language": "en", "subitem_text_value": "Department of Electronic Engineering, Okayama University of Science"}, {"subitem_text_language": "en", "subitem_text_value": "Department of Electronic Engineering, Okayama University of Science"}]}, "item_1_text_9": {"attribute_name": "著者所属(日)", "attribute_value_mlt": [{"subitem_text_language": "ja", "subitem_text_value": "岡山理科大学大学院理学研究科"}, {"subitem_text_language": "ja", "subitem_text_value": "岡山理科大学大学院理学研究科"}, {"subitem_text_language": "ja", "subitem_text_value": "岡山理科大学電子工学科"}, {"subitem_text_language": "ja", "subitem_text_value": "岡山理科大学電子工学科"}]}, "item_files": {"attribute_name": "ファイル情報", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "1989-03-20"}], "displaytype": "detail", "download_preview_message": "", "file_order": 0, "filename": "KJ00000063376.pdf", "filesize": [{"value": "566.5 kB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_note", "mimetype": "application/pdf", "size": 566500.0, "url": {"url": "https://ous.repo.nii.ac.jp/record/823/files/KJ00000063376.pdf"}, "version_id": "5ddff913-c83b-434c-b3d1-cb51317df102"}]}, "item_language": {"attribute_name": "言語", "attribute_value_mlt": [{"subitem_language": "jpn"}]}, "item_resource_type": {"attribute_name": "資源タイプ", "attribute_value_mlt": [{"resourcetype": "departmental bulletin paper", "resourceuri": "http://purl.org/coar/resource_type/c_6501"}]}, "item_title": "PASを用いた高周波プラズマCVD SiC:H薄膜の研究", "item_titles": {"attribute_name": "タイトル", "attribute_value_mlt": [{"subitem_title": "PASを用いた高周波プラズマCVD SiC:H薄膜の研究", "subitem_title_language": "ja"}, {"subitem_title": "Photoacoustic Spectrum of a-SiC:H films prepared by rf Plasma-enhanced CVD", "subitem_title_language": "en"}, {"subitem_title": "PAS オ モチイタ コウシュウハ プラズマ CVD SIC H ハクマク ノ ケンキュウ", "subitem_title_language": "ja-Kana"}]}, "item_type_id": "1", "owner": "14", "path": ["322"], "permalink_uri": "https://ous.repo.nii.ac.jp/records/823", "pubdate": {"attribute_name": "PubDate", "attribute_value": "1989-03-20"}, "publish_date": "1989-03-20", "publish_status": "0", "recid": "823", "relation": {}, "relation_version_is_last": true, "title": ["PASを用いた高周波プラズマCVD SiC:H薄膜の研究"], "weko_shared_id": -1}