{"created":"2023-06-19T10:34:56.699388+00:00","id":823,"links":{},"metadata":{"_buckets":{"deposit":"a17dd998-dc40-4aef-b4a3-6d6bf2abdb1e"},"_deposit":{"created_by":14,"id":"823","owners":[14],"pid":{"revision_id":0,"type":"depid","value":"823"},"status":"published"},"_oai":{"id":"oai:ous.repo.nii.ac.jp:00000823","sets":["296:314:322"]},"author_link":[],"item_1_biblio_info_14":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"1989-03-20","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"148","bibliographicPageStart":"137","bibliographicVolumeNumber":"24","bibliographic_titles":[{"bibliographic_title":"岡山理科大学紀要. A, 自然科学","bibliographic_titleLang":"ja"},{"bibliographic_title":"Bulletin of Okayama University of Science. A, Natural Sciences","bibliographic_titleLang":"en"}]}]},"item_1_creator_6":{"attribute_name":"著者名","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"栗田, 満史","creatorNameLang":"ja"},{"creatorName":"クリタ, ミツフミ","creatorNameLang":"ja-Kana"},{"creatorName":"Kurita, Mitsufumi","creatorNameLang":"en"}]},{"creatorNames":[{"creatorName":"竹中, 進","creatorNameLang":"ja"},{"creatorName":"タケナカ, ススム","creatorNameLang":"ja-Kana"},{"creatorName":"Takenaka, Susumu","creatorNameLang":"en"}]},{"creatorNames":[{"creatorName":"中川, 紀美雄","creatorNameLang":"ja"},{"creatorName":"ナカガワ, キミオ","creatorNameLang":"ja-Kana"},{"creatorName":"Nakagawa, Kimio","creatorNameLang":"en"}]},{"creatorNames":[{"creatorName":"赤尾, 文雄","creatorNameLang":"ja"},{"creatorName":"アカオ, フミオ","creatorNameLang":"ja-Kana"},{"creatorName":"Akao, Fumio","creatorNameLang":"en"}]}]},"item_1_description_1":{"attribute_name":"ページ属性","attribute_value_mlt":[{"subitem_description":"P(論文)","subitem_description_type":"Other"}]},"item_1_description_12":{"attribute_name":"抄録(英)","attribute_value_mlt":[{"subitem_description":"We have optically characterized a-SiC : H films prepared by plasma-CVD techniques under various deposition conditions. Infrared spectra were measured at room temperature, from which the banded H content (C_H) could be deduced. The optical band gap (E_o) and the slop of Urbach tail (E_e) by means of photoacoustic spectroscopy (PAS) at room temperature were obtained. The correlation between E_e and C_H was discussed from these data. As the result, we have found that the increase of the amount of H_2 gas affects the Urbach tail and serves the suppression of the disorder in the lattice.","subitem_description_language":"en","subitem_description_type":"Other"}]},"item_1_source_id_13":{"attribute_name":"雑誌書誌ID","attribute_value_mlt":[{"subitem_source_identifier":"AN00033244","subitem_source_identifier_type":"NCID"}]},"item_1_text_10":{"attribute_name":"著者所属(英)","attribute_value_mlt":[{"subitem_text_language":"en","subitem_text_value":"Graduate School of Science, Okayama University of Science"},{"subitem_text_language":"en","subitem_text_value":"Graduate School of Science, Okayama University of Science"},{"subitem_text_language":"en","subitem_text_value":"Department of Electronic Engineering, Okayama University of Science"},{"subitem_text_language":"en","subitem_text_value":"Department of Electronic Engineering, Okayama University of Science"}]},"item_1_text_9":{"attribute_name":"著者所属(日)","attribute_value_mlt":[{"subitem_text_language":"ja","subitem_text_value":"岡山理科大学大学院理学研究科"},{"subitem_text_language":"ja","subitem_text_value":"岡山理科大学大学院理学研究科"},{"subitem_text_language":"ja","subitem_text_value":"岡山理科大学電子工学科"},{"subitem_text_language":"ja","subitem_text_value":"岡山理科大学電子工学科"}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"1989-03-20"}],"displaytype":"detail","filename":"KJ00000063376.pdf","filesize":[{"value":"566.5 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"url":"https://ous.repo.nii.ac.jp/record/823/files/KJ00000063376.pdf"},"version_id":"5ddff913-c83b-434c-b3d1-cb51317df102"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"departmental bulletin paper","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"PASを用いた高周波プラズマCVD SiC:H薄膜の研究","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"PASを用いた高周波プラズマCVD SiC:H薄膜の研究","subitem_title_language":"ja"},{"subitem_title":"Photoacoustic Spectrum of a-SiC:H films prepared by rf Plasma-enhanced CVD","subitem_title_language":"en"},{"subitem_title":"PAS オ モチイタ コウシュウハ プラズマ CVD SIC H ハクマク ノ ケンキュウ","subitem_title_language":"ja-Kana"}]},"item_type_id":"1","owner":"14","path":["322"],"pubdate":{"attribute_name":"PubDate","attribute_value":"1989-03-20"},"publish_date":"1989-03-20","publish_status":"0","recid":"823","relation_version_is_last":true,"title":["PASを用いた高周波プラズマCVD SiC:H薄膜の研究"],"weko_creator_id":"14","weko_shared_id":-1},"updated":"2023-09-27T05:54:18.718970+00:00"}