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反応性大電力パルススパッタリングにおけるDLC成膜の放電特性
https://ous.repo.nii.ac.jp/records/2254
https://ous.repo.nii.ac.jp/records/2254babe708b-f32f-4ca0-855a-56696cbe3c7a
名前 / ファイル | ライセンス | アクション |
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54a05.pdf (3.0 MB)
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Item type | 紀要論文(ELS) / Departmental Bulletin Paper(1) | |||||
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公開日 | 2019-02-15 | |||||
タイトル | ||||||
言語 | ja | |||||
タイトル | 反応性大電力パルススパッタリングにおけるDLC成膜の放電特性 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Discharge Characteristics of DLC Films Formation using Reactive High-Power Impulse Magnetron Sputtering | |||||
タイトル | ||||||
言語 | ja-Kana | |||||
タイトル | ハンノウセイ ダイデンリョク パルス スパッタリング ニオケル DLCセイマク ノ ホウデン トクセイ | |||||
言語 | ||||||
言語 | jpn | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | departmental bulletin paper | |||||
ページ属性 | ||||||
内容記述タイプ | Other | |||||
内容記述 | P(論文) | |||||
著者名 |
福江, 紘幸
× 福江, 紘幸× 岡野, 忠之× 黒岩, 雅英× クルモフ, バレリー× 中谷, 達行 |
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著者所属(日) | ||||||
ja | ||||||
岡山理科大学大学院工学研究科修士課程電子工学専攻 | ||||||
著者所属(日) | ||||||
ja | ||||||
東京電子株式会社 | ||||||
著者所属(日) | ||||||
ja | ||||||
東京電子株式会社 | ||||||
著者所属(日) | ||||||
ja | ||||||
岡山理科大学工学部電気電子システム学科 | ||||||
著者所属(日) | ||||||
ja | ||||||
岡山理科大学技術科学研究所先端材料工学部門 | ||||||
著者所属(英) | ||||||
en | ||||||
Graduate School of Engineering, Okayama University of Science | ||||||
著者所属(英) | ||||||
en | ||||||
Tokyo Electronics Co.,Ltd. | ||||||
著者所属(英) | ||||||
en | ||||||
Tokyo Electronics Co.,Ltd. | ||||||
著者所属(英) | ||||||
en | ||||||
Department of Electrical and Electronic Engineering, Faculty of Engineering, Okayama University of Science | ||||||
著者所属(英) | ||||||
en | ||||||
Research Institute of Technology, Okayama University of Science | ||||||
雑誌書誌ID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AN00033244 | |||||
書誌情報 |
ja : 岡山理科大学紀要. A, 自然科学 en : Bulletin of Okayama University of Science. A, Natural Sciences 巻 54, p. 37-41, 発行日 2019-02-15 |