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II-VI族化合物結晶成長用分子線エピタキシ装置の製作
https://ous.repo.nii.ac.jp/records/718
https://ous.repo.nii.ac.jp/records/7188fd80fdc-8008-420b-98a4-7fef92205fe5
名前 / ファイル | ライセンス | アクション |
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KJ00000063271.pdf (1.1 MB)
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Item type | 紀要論文(ELS) / Departmental Bulletin Paper(1) | |||||
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公開日 | 1986-03-05 | |||||
タイトル | ||||||
言語 | ja | |||||
タイトル | II-VI族化合物結晶成長用分子線エピタキシ装置の製作 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Apparatus for Crystal Growth of II-VI Compounds by Means of Molecular Beam Epitaxy Method | |||||
タイトル | ||||||
言語 | ja-Kana | |||||
タイトル | 2-6ゾク カゴウブツ ケッショウ セイチョウヨウ ブンシセン エピタキシ ソウチ ノ セイサク | |||||
言語 | ||||||
言語 | jpn | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | departmental bulletin paper | |||||
ページ属性 | ||||||
内容記述タイプ | Other | |||||
内容記述 | P(論文) | |||||
著者名 |
大石, 正和
× 大石, 正和× 大森, 健三× 藤井, 義弘× 斉藤, 博 |
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著者所属(日) | ||||||
ja | ||||||
岡山理科大学理学部応用物理学科 | ||||||
著者所属(日) | ||||||
ja | ||||||
岡山理科大学理学部応用物理学科 | ||||||
著者所属(日) | ||||||
ja | ||||||
岡山理科大学理学部応用物理学科 | ||||||
著者所属(日) | ||||||
ja | ||||||
岡山理科大学理学部応用物理学科 | ||||||
著者所属(英) | ||||||
en | ||||||
Department of Applied Physics, Faculty of Science, Okayama University of Science | ||||||
著者所属(英) | ||||||
en | ||||||
Department of Applied Physics, Faculty of Science, Okayama University of Science | ||||||
著者所属(英) | ||||||
en | ||||||
Department of Applied Physics, Faculty of Science, Okayama University of Science | ||||||
著者所属(英) | ||||||
en | ||||||
Department of Applied Physics, Faculty of Science, Okayama University of Science | ||||||
抄録(英) | ||||||
内容記述タイプ | Other | |||||
内容記述 | An apparatus for the crystal growth of II-VI compounds by means of molecular beam epitaxy (MBE) are reported. The apparatus consists of two vacuum chambers. One is for the crystal growth itself and the other is the sub-chamber to exchange samples without exposing the main chamber to the atmospheric pressure. The main chamber is equipped with four Knudsen-cells, a manupilator to handle samples in the vacuum. a quadrupole mass filter for the analysis of residual gasses, and a device for high energy electron diffraction (RHEED) measurements. The main chamber is evacuated by a 300l/sec turbomolecular pump, and keeps at pressure down to 10^<-10> Torr under the operating condition. The analyses by the quadrupole mass filter shows only a strong signal by H_2 molecule and a trace of CO. The apparatus is now in operation for the homoepitaxial growth of ZnSe thin films on ZnSe substrate. | |||||
言語 | en | |||||
雑誌書誌ID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AN00033244 | |||||
書誌情報 |
ja : 岡山理科大学紀要. A, 自然科学 en : Bulletin of Okayama University of Science. A, Natural Sciences 巻 21, p. 33-47, 発行日 1986-03-05 |