@article{oai:ous.repo.nii.ac.jp:00000718,
 author = {大石, 正和 and Ohishi, Masakazu and 大森, 健三 and Ohmori, Kenzo and 藤井, 義弘 and Fujii, Yoshihiro and 斉藤, 博 and Saito, Hiroshi},
 journal = {岡山理科大学紀要. A, 自然科学, Bulletin of Okayama University of Science. A, Natural Sciences},
 month = {Mar},
 note = {P(論文), An apparatus for the crystal growth of II-VI compounds by means of molecular beam epitaxy (MBE) are reported. The apparatus consists of two vacuum chambers. One is for the crystal growth itself and the other is the sub-chamber to exchange samples without exposing the main chamber to the atmospheric pressure. The main chamber is equipped with four Knudsen-cells, a manupilator to handle samples in the vacuum. a quadrupole mass filter for the analysis of residual gasses, and a device for high energy electron diffraction (RHEED) measurements. The main chamber is evacuated by a 300l/sec turbomolecular pump, and keeps at pressure down to 10^<-10> Torr under the operating condition. The analyses by the quadrupole mass filter shows only a strong signal by H_2 molecule and a trace of CO. The apparatus is now in operation for the homoepitaxial growth of ZnSe thin films on ZnSe substrate.},
 pages = {33--47},
 title = {II-VI族化合物結晶成長用分子線エピタキシ装置の製作},
 volume = {21},
 year = {1986},
 yomi = {オオイシ, マサカズ and オオモリ, ケンゾウ and フジイ, ヨシヒロ and サイトウ, ヒロシ}
}